I have two questions: I am working on quantifying uncertainty and resolution in APA using a traceable pitch standard (metro-chip for the moment). We rely almost exclusively on the BSE detector for APA except when the sample material is same or lighter than the substrate (as with C fibers). In order to be consistent, then, I need to measure the metrochip with the same detector as the morphology. I assume if we set APA to identify particles using BSE then the morphology measurements are also BSE?
Also, when collecting EDS for a particle during APA, is the beam in a fixed position or does it "raster" or move similar to the RCA?
Thanks!
Amber,
The search and measure detectors are the same.
The default APA EDS beam position is point mode. It can also be configured for chord raster.
Nicholas