Hello,
I just recently downloaded DTSA-II from NIST. I have (I believe) a simple simulation I would like to run, but cannot seem to pull it out from DTSA. Maybe someone can help me, or recommend another approach.
Question: I want to show a simulation which tests whether Fluorine can be detected under 100Å of SiO2 using 5 kV. As a follow up, I would like to plot that as a function of oxide thickness and ideally take-off angle. For the fluorine, assume a buried 20Å film of PTFE.
Many thanks for any help!
Amedeo
Hi Amadeo,
I can't speak to DTSA, but if you have downloaded CalcZAF you can easily generate a spectrum and intensities for a thin film model and a standard using the Penepma Monte Carlo software that it comes with:
http://www.probesoftware.com/download/CalcZAF.msi
A tutorial and examples are found here:
http://smf.probesoftware.com/index.php?topic=57.0
On a more crude basis one can simply calculate the absorption of F Ka in SiO2 using the Model Electron and Xray Ranges dialog in CalcZAF as shown here:
http://smf.probesoftware.com/index.php?topic=86.msg309#msg309
john
Look under "Tools > Simulation Alien". The dialog will step you through the process.