Sputter coater, lateral variation

[Ben Buse]

Hi,

Here are some maps of a glass slide coated in Au in a sputter coater. The glass slide was mounted centrally beneath the target, which is 57mm in diameter and the stage was spinning.



You can see the Au coat is thickest in the middle 15 mm, and also enriched at the edges of the glass slide. Na does the oppose.

Ben

[BenjaminWade]

Hi Ben
I assume that perhaps this sputter coater doesnt have a rotating planetary stage and is just a single rotation axis?

Cheers

[Ben Buse]

Yes that's right,

I was just looking are many manufacturers sell rotary-planetary-tilting stages. Have you used one? Do you need to tilt?

Ben