SX100 stage hardware problem

[Utah-Wil]

Hello,  I apologize if this has been discussed previously, though I've not found it if it has. 

I'm having a problem with my stage where I feel that the position signal on the X and Y axis needs adjustment.  There is an oscillation at the end of a travel where it seems like the stage is confused on it's actual position.  The stage tests and initializes without issue.  Does anybody have experience with testing and adjusting the encoder/decoder signal using an O-scope and if so can you please send any tips and tricks my way.

Thank you!
wil

[Probeman]

I'm having a problem with my stage where I feel that the position signal on the X and Y axis needs adjustment.  There is an oscillation at the end of a travel where it seems like the stage is confused on it's actual position.  The stage tests and initializes without issue.  Does anybody have experience with testing and adjusting the encoder/decoder signal using an O-scope and if so can you please send any tips and tricks my way.

I can't remember what the part is called, but there is a friction adjustment on the stage lead screw that needs to be tightened when the stage position doesn't "home" within the time out limit.  I've seen this on several Cameca instruments.

This problem is ignored by the Cameca software, but Probe for EPMA does report when the stage doesn't return a "motion complete" status within the timeout limit.

Solution: ask your Cameca engineer for instructions to adjust this or schedule a service visit.