Casino3D_SEs

[Ben]

Hi,
I'm running 3.3.0.4 and I'd like to get some rough idea how my sample will behave in an SEM.

I'm looking at one of the sample files  "TestRangeSampleBox", which I modifiied to be 2x2x2 µm. so that it behaves basically like a nice big lump of Al.

I am using a single point and a 2keV beam.

I told the software to calculate SE's and told it that it should calculate them down to 1eV.

In the distribution of Backscattered Energy I get the highest peak around 5eV so this look normal to me.

What bothers me is when I display the trajectories, it looks like no SE's ever make it out of the sample.

I thought asking it to color the electrons by energy would help but this also "looks" wrong

Thanks for any help!

[Ben Buse]

Just looking at the paper on it https://onlinelibrary.wiley.com/doi/full/10.1002/sca.20262 and wondering can you see the SE yield? I haven't used the 3d version much or for very long time to try out

[Ben]

Hi,

Thanks for getting back to me.

Yes I read this paper. It's quite helpful, I reproduced the  Sn balls on carbon image  as a sort of quick check, but there is no option I could see to differentiate between SE's and BSE's.

I guess I need to look at the raw data myself ?

One problem I have is the software crashes quite often. I try to make a image, it get's 90% of the way and then dies.
Maybe it works better if I were to run it from dos?

[Ben Buse]

That's frustrating I wonder if @hdemers could comment (can you tag a user?)

Otherwise have you tried otherr monte carlo software? I don't know which easiest or best for secondary electrons, or for what your doing?

eg https://montecarlomodeling.mcgill.ca/software/softwareprojects.html

[Nicholas Ritchie]

If you are serious about secondary modeling for semi-conductor devices, you might contact john.villarrubia@nist.gov.  His JMonsel is not the easiest to use but has sophisticated models.

[Probeman]

That's frustrating I wonder if @hdemers could comment (can you tag a user?)

You can send a PM (private message) to another user, by clicking on their username...

[Ben Buse]

I'm running 3.3.0.4 and I'd like to get some rough idea how my sample will behave in an SEM.

In the distribution of Backscattered Energy I get the highest peak around 5eV so this look normal to me.

What bothers me is when I display the trajectories, it looks like no SE's ever make it out of the sample.

Ok playing with casino 3.3.0.4, don't get distribution of BS electrons - depth or energy or angle - where did you see this

But do get BSE yield and SE yield (provided for material it has SE parameters)

[Ben Buse]

Here's eg for SE yield for multiple points over SiO2 particle on SiO2 substrate

with 1000 trajectories per point


with 10000 trajectories per point

[hdemers]

Hi Ben,

The SE trajectories are green inside the sample and purple outside the sample as we can see in the screenshot from Ben Buse.

For the crash, I am surprise. The only crash I had over many years of using it is running out of memory. SE simulation generates a lot of trajectories and data. For an image, be sure to disable Conserve Data For Each Simulated Point in the Microscope and Simulation Properties windows.

If you still do not have SE, send me your .sim file at hendrix.demers@mail.mcgill.ca I will check it.
The SE calculation in CASINO v3 is based on Monsel implementation from John Villarrubia.

Regards,
Hendrix