Jeol beam scan units FOV

[Ben Buse]

Hi John & Brian,

The units displayed in Scan Setup in Probe Image for scan size when using a beam scan seem to be wrong it states 18000 x 9000 um (x6500 mag) when its really ca. 18um *10um. This is not the case for stage scan.

Thanks

Ben

[John Donovan]

The units displayed in Scan Setup in Probe Image for scan size when using a beam scan seem to be wrong it states 18000 x 9000 um (x6500 mag) when its really ca. 18um *10um. This is not the case for stage scan.

Hi Ben,
That makes sense that you don't see it for stage scans as the beam calibration values are only used for beam scans.

I'm not seeing the problem.  Are you on the latest 1.2.3.2016 of PI?   Please check your beam scan calibration values in the Setup | Probe Image Setup dialog.
john

[Ben Buse]

Thanks I suspect its just I havn't calibrated it - I don't want to look at it now as its running

Ben

[Ben Buse]

Hi John,

Just checked and I'd sometime entered all the beam calibration FOV values as microns and it requests them as mm - easy solution and now working great 

Ben