Platinum sputter coating

[Ben Buse]

Hi,

Has anyone experience with platinum sputter coating? Is it any good with low vacuum rotary pump or does it need turbo pump pressures?

Just read the following website.

https://www.labtech-em.com/em/platinum-pt-sputter-coater-targets

"Platinum has a finer grain size than gold or Au/Pd and is therefore more suitable for higher magnification sputtering applications. Platinum also has an excellent SE yield, but the higher work function of platinum results in a slower sputtering than gold. Platinum films tend to be sensitive to "stress cracking" when oxygen is present (oxygen can come from porous specimens).

The Safematic CCU-010 LV low vacuum coater will sputter Pt, but for optimum crack-free results the CCU-010 HV high vacuum coater is recommended."